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Specific features of morphology and the structure of nanocrystalline cubic silicon carbide films grown on a silicon surface

✍ Scribed by L. K. Orlov; Yu. N. Drozdov; V. I. Vdovin; Yu. I. Tarasova; T. N. Smyslova

Book ID: 111446479
Publisher: SP MAIK Nauka/Interperiodica
Year: 2009
Tongue: English
Weight: 632 KB
Volume: 51
Category: Article
ISSN: 1063-7834
DOI: 10.1134/s106378340905028x

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