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Fast Growth of Polycrystalline Film in SiCl 4 /H 2 Plasma

✍ Scribed by Rui, Huang; Xuan-Ying, Lin; Yun-Peng, Yu; Kui-Xun, Lin; Jun-Hong, Wei; Chu-Ying, Yu; Zhao-Kui, Wang

Book ID: 120993496
Publisher: Institute of Physics
Year: 2004
Tongue: English
Weight: 261 KB
Volume: 21
Category: Article
ISSN: 0256-307X
DOI: 10.1088/0256-307X/21/6/053

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