๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Fast deposition of amorphous hydrogenated carbon films using a supersonically expanding arc plasma

โœ Scribed by G. M. W. Kroesen; D. C. Schram; M. J. F. van de Sande

Publisher
Springer
Year
1990
Tongue
English
Weight
763 KB
Volume
10
Category
Article
ISSN
0272-4324

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Microwave plasma apparatus for depositio
Microwave plasma apparatus for deposition of hydrogenated amorphous carbon layers
โœ K. Hammer; S. Roth; B. Mainz; O. Stenzel; W. Scharff; W. Dworschak; R. Kleber; A ๐Ÿ“‚ Article ๐Ÿ“… 1991 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 242 KB

A novel arrangement for the production of a microwave plasma by electron cyclotron resonance is described. Ion currents with current densities of up to 2.5 mA cm-2 can be homogeneously extracted from the plasma over surfaces having diameters of up to 10 cm. The microwave plasmatron can be operated b