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Factors influencing the dressing rate of chemical mechanical polishing pad conditioning

โœ Scribed by Pei-Lum Tso; Shuo-Young Ho

Publisher
Springer
Year
2006
Tongue
English
Weight
237 KB
Volume
33
Category
Article
ISSN
0268-3768

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## Abstract Growth rate of potassium sulfate crystals was studied in a fluidized bed crystallizer. Higher growth rates were observed at larger bed heights. Larger crystals grow faster than smaller size crystals due to the changed fluid dynamics. The growth rate was found to be very sensitive to the