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Fabry–Perot cavity chemical sensors by silicon micromachining techniques

✍ Scribed by Han, Jaeheon

Book ID: 121809179
Publisher: American Institute of Physics
Year: 1999
Tongue: English
Weight: 709 KB
Volume: 74
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.123056

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