SPIE Proceedings [SPIE OFS2012 22nd International Conference on Optical Fiber Sensor - Beijing, , China (Sunday 14 October 2012)] OFS2012 22nd International Conference on Optical Fiber Sensors - Design and fabrication of SU-8 MEMS electrostatically tunable optical Fabry-Perot cavity based on photolithography technique

✍ Scribed by Mehrvar, L.; Nouri, S.; Taghavi, M.; Beygi Azar, F.; Sadegh Cheri, M.; Zibaii, M. I.; Ghezelaiagh, M. H.; Latifi, H.; Liao, Yanbiao; Jin, Wei; Sampson, David D.; Yamauchi, Ryozo; Chung, Youngjoo; Nakamura, Kentaro; Rao, Yunjiang

• Book ID: 121283085
• Publisher: SPIE
• Year: 2012
• Weight: 402 KB
• Volume: 8421
• Category: Article
• DOI: 10.1117/12.966338