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Fabrication of Zr–N codoped p-type ZnO thin films by pulsed laser deposition

✍ Scribed by Kim, H.; Cepler, A.; Osofsky, M. S.; Auyeung, R. C. Y.; Piqué, A.


Book ID
121491008
Publisher
American Institute of Physics
Year
2007
Tongue
English
Weight
318 KB
Volume
90
Category
Article
ISSN
0003-6951

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Al and N codoped ZnO thin films were grown on n-Si (100) substrate by sputtering technique. Hall effect measurements of as-grown films exhibited n-type conduction, however 500 °C Ar annealed codoped films showed p-type conductivity with a hole concentration of 9.9 × 10 16 cm -3 , resistivity of 15.9