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Fabrication of suspended thin film resonator for application of RF bandpass filter

✍ Scribed by Hyun Ho Kim; Byeong Kwon Ju; Yun Hi Lee; Si Hyung Lee; Jeon Kook Lee; Soo Won Kim

Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 536 KB
Volume: 44
Category: Article
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2003.09.007

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