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Fabrication of support structures to prevent SU-8 stiction in high aspect ratio structures

โœ Scribed by K. D. Vora; A. G. Peele; B.-Y. Shew; E. C. Harvey; J. P. Hayes


Publisher
Springer-Verlag
Year
2006
Tongue
English
Weight
522 KB
Volume
13
Category
Article
ISSN
0946-7076

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