✦ LIBER ✦
Reduction of diffraction effect for fabrication of very high aspect ratio microchannels in SU-8 over large area by soft cushion technology
✍ Scribed by Jun Zhang; Mary B. Chan-Park; Jianmin Miao; Tie T Sun
- Publisher
- Springer-Verlag
- Year
- 2005
- Tongue
- English
- Weight
- 393 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0946-7076
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