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Fabrication of silicon aperture probes for scanning near-field optical microscopy by focused ion beam nano machining

✍ Scribed by C. Lehrer; L. Frey; S. Petersen; Th. Sulzbach; O. Ohlsson; Th. Dziomba; H.U. Danzebrink; H. Ryssel

Book ID: 114155274
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 722 KB
Volume: 57-58
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(01)00463-4

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