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[IEEE Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Orlando, FL, USA (1999.01.21-1999.01.21)] Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - A novel fabrication method of the tiny aperture tip on silicon cantilever for near field scanning optical microscopy

✍ Scribed by Minh, P.N.; Ono, T.; Esashi, M.

Book ID: 126730626
Publisher: IEEE
Year: 1999
Tongue: English
Weight: 941 KB
Edition: 1999
Category: Article
ISBN-13: 9780780351943
DOI: 10.1109/MEMSYS.1999.746855

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