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Fabrication of Si microstructures using focused ion beam implantation and reactive ion etching

✍ Scribed by Qian, H X; Zhou, Wei; Miao, Jianmin; Lim, Lennie E N; Zeng, X R

Book ID
120454352
Publisher
Institute of Physics
Year
2008
Tongue
English
Weight
867 KB
Volume
18
Category
Article
ISSN
0960-1317

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