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Direct write patterning of titanium films using focused ion beam implantation and plasma etching

✍ Scribed by J.M.Frank Zachariasse; John F. Walker


Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
237 KB
Volume
35
Category
Article
ISSN
0167-9317

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## Abstract The surface properties of materials are believed to control most of the biological reactions toward implanted materials. To study the surface structure, elemental distribution, and morphology, using transmission electron microscopy (TEM) techniques, thin foils of the surface (in cross‐s