Fabrication of Quantum Dots with Scanning Probe Nanolithography

✍ Scribed by U.F. Keyser; H.W. Schumacher; U. Zeitler; R.J. Haug; K. Eberl

• Book ID: 101307887
• Publisher: John Wiley and Sons
• Year: 2001
• Tongue: English
• Weight: 87 KB
• Volume: 224
• Category: Article
• ISSN: 0370-1972
• DOI: 10.1002/(sici)1521-3951(200104)224:3<681::aid-pssb681>3.0.co;2-d

✦ Synopsis

We are using an atomic force microscope for the direct fabrication of low-dimensional quantum structures in GaAs/AlGaAs heterostructures. By combining mechanical nanolithography with current-controlled local oxidation it is possible to design devices such as a single-electron transistor with different shapes. In this step-by-step process the devices can be tested after every step of the nanolithography, which allows a very controlled fabrication of quantum dots. Here we present our experiments on systems with 2D-0D-2D and 2D-1D-2D tunneling characteristics.