Scanning probe with an integrated diamond heater element for nanolithography

✍ Scribed by Bae, Joon Hyung; Ono, Takahito; Esashi, Masayoshi

• Book ID: 120079528
• Publisher: American Institute of Physics
• Year: 2003
• Tongue: English
• Weight: 845 KB
• Volume: 82
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.1541949