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FABRICATION OF PZT THIN FILMS WITH TiO x BUFFER LAYERS BY RF MAGNETRON SPUTTERING

✍ Scribed by ZHONG, CHAOWEI; PENG, JIAGEN; ZHANG, SHUREN; ZHANG, WANGLI

Book ID: 125418723
Publisher: Taylor and Francis Group
Year: 2006
Tongue: English
Weight: 922 KB
Volume: 80
Category: Article
ISSN: 1058-4587
DOI: 10.1080/10584580600659829

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