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Fabrication of porous silicon by metal-assisted etching using highly ordered gold nanoparticle arrays

✍ Scribed by Sebastian P Scheeler, Simon Ullrich, Stefan Kudera, Claudia Pacholski

Book ID
119906070
Publisher
Springer-Verlag
Year
2012
Tongue
English
Weight
691 KB
Volume
7
Category
Article
ISSN
1931-7573

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Fabrication of ordered silicon nanopilla
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✍ Boarino, Luca ;Imbraguglio, Dario ;Enrico, Emanuele ;De Leo, Natascia ;Celegato, πŸ“‚ Article πŸ“… 2011 πŸ› John Wiley and Sons 🌐 English βš– 611 KB

## Abstract Silicon nanowires (SiNWs) and nanopillars have been obtained by metal‐assisted etching (MAE), starting from silver thin films deposited by thermal evaporation and sputtering on silicon substrates. Different deposition methods and thickness are strongly affecting spatial distribution and