In this work, we report an approach to fabricate Si nanopillar arrays by nanosphere lithography. With this method, the periods of Si arrays can be controlled by using different sized spheres. The produced Si arrays exhibit broadband antireflections, and the spectral positions with low reflection str
✦ LIBER ✦
Fabrication of nanopillars by nanosphere lithography
✍ Scribed by Cheung, C L; Nikolić, R J; Reinhardt, C E; Wang, T F
- Book ID
- 120371446
- Publisher
- Institute of Physics
- Year
- 2006
- Tongue
- English
- Weight
- 463 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0957-4484
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