We investigate the fabrication of periodic square arrays of solid gold islands by angle-resolved nanosphere lithography (ARNSL) in conjunction with thermal evaporation and etching. By varying h (the tilt angle between the direction of gold deposition beam and the substrate surface normal) and / (the substrate rotation angle about the beam axis), adjacent islands on a deposited hexagonal gold array will have a constant and periodic difference in height. Upon etching, this height bias will result in the shorter structures being removed to produce an array with a different symmetry from the original hexagonal symmetry of the parent mask. By depositing at three directions of / = 0Β°, 120Β°and Γ120Β°with a constant h = 20Β°, experimental results show that deposited two-dimensional gold periodic arrays will have a measurable difference in height between adjacent islands. Etching of the resulting patterns produced periodic nearsquare arrays with triangular nanostructures. Thus the combination of ARNSL and etching can allow selective periodic nanostructures to be removed, increasing the diversity of array symmetries available through nanosphere lithography.