Fabrication of large-scale periodic silicon nanopillar arrays for 2D nanomold using modified nanosphere lithography

✍ Scribed by Wei Li; Ling Xu; Wei-Ming Zhao; Ping Sun; Xin-Fan Huang; Kun-Ji Chen

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 555 KB
• Volume: 253
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2007.05.024