Fabrication of Large-Area Periodic Nanopillar Arrays for Nanoimprint Lithography Using Polymer Colloid Masks

✍ Scribed by C.-W. Kuo; J.-Y. Shiu; Y.-H. Cho; P. Chen

• Publisher: John Wiley and Sons
• Year: 2003
• Tongue: English
• Weight: 144 KB
• Volume: 15
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/adma.200304824