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Fabrication of nanopatterned sapphire substrates by annealing of patterned Al thin films by Laser Interference Lithography

✍ Scribed by Cui, Lin; Wang, Gui-Gen; Zhang, Hua-Yu; Han, Jie-Cai; Kuang, Xu-Ping; Tian, Ji-Li; Sun, Rui

Book ID
121626468
Publisher
Springer
Year
2013
Tongue
English
Weight
807 KB
Volume
115
Category
Article
ISSN
1432-0630

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We report that one-dimensional (1D) and two-dimensional (2D) metal thin film gratings can be directly fabricated by interfering Nd-YAG pulsed laser beams (wavelength = 1064 nm, pulse width = 6 ns) incident from the backside of glass substrate. This process utilizes a laser-induced thermo-elastic for