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Fabrication of large-area nano-scale patterned sapphire substrate with laser interference lithography

✍ Scribed by Xuan, Ming-dong; Dai, Long-gui; Jia, Hai-qiang; Chen, Hong

Book ID: 121582504
Publisher: Tianjin University of Technology
Year: 2014
Tongue: English
Weight: 260 KB
Volume: 10
Category: Article
ISSN: 1673-1905
DOI: 10.1007/s11801-014-3188-6

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