Large-scale fabrication of nanopatterned sapphire substrates by annealing of patterned Al thin films by soft UV-nanoimprint lithography

✍ Scribed by L. Cui; J. Han; G. Wang; H. Zhang; R. Sun; L. Li

• Book ID: 121862547
• Publisher: Springer-Verlag
• Year: 2013
• Tongue: English
• Weight: 745 KB
• Volume: 8
• Category: Article
• ISSN: 1931-7573
• DOI: 10.1186/1556-276X-8-472