Fabrication of nanomechanical optical devices with aligned wafer bonding

✍ Scribed by C. Gui; G. J. Veldhuis; T. M. Koster; P. V. Lambeck; J. W. Berenschot; J. G. E. Gardeniers; M. Elwenspoek

• Book ID: 106186354
• Publisher: Springer-Verlag
• Year: 1999
• Tongue: English
• Weight: 456 KB
• Volume: 5
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s005420050153