✦ LIBER ✦
Fabrication of optically smooth, through-wafer silicon molds for PDMS total internal reflection-based devices
✍ Scribed by Nam Cao Hoai Le; Dzung Viet Dao; Ryuji Yokokawa; John C. Wells; Susumu Sugiyama
- Publisher
- Springer-Verlag
- Year
- 2009
- Tongue
- English
- Weight
- 522 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0946-7076
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