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Adhesive bonding with SU-8 at wafer level for microfluidic devices

✍ Scribed by Yu, Liming; Tay, Francis E H; Xu, Guolin; Chen, Bangtao; Avram, Marioara; Iliescu, Ciprian

Book ID: 118175322
Publisher: Institute of Physics
Year: 2006
Tongue: English
Weight: 267 KB
Volume: 34
Category: Article
ISSN: 1742-6588
DOI: 10.1088/1742-6596/34/1/128

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