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Fabrication of n-metal–oxide semiconductor field effect transistor with Ta2O5 gate oxide prepared by plasma enhanced metalorganic chemical vapor deposition

✍ Scribed by Kim, Sun-Oo


Book ID
121758304
Publisher
AVS (American Vacuum Society)
Year
1994
Tongue
English
Weight
616 KB
Volume
12
Category
Article
ISSN
0734-211X

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