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Fabrication of multilevel silicon structures by anisotropic deep silicon etching

✍ Scribed by R. Huber; J. Conrad; L. Schmitt; K. Hecker; J. Scheurer; M. Weber

Book ID: 114155538
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 429 KB
Volume: 67-68
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(03)00097-2

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