Fabrication of microprisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam–sensitive glass

✍ Scribed by Gimkiewicz, Christiane ;Hagedorn, Detlev ;Jahns, Jürgen ;Kley, Ernst-Bernhard ;Thoma, Frank

• Book ID: 115348053
• Publisher: The Optical Society
• Year: 1999
• Tongue: English
• Weight: 782 KB
• Volume: 38
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.38.002986