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Fabrication of micro-optical elements in quartz by laser induced backside wet etching

✍ Scribed by G. Kopitkovas; T. Lippert; C. David; A. Wokaun; J. Gobrecht


Book ID
114155540
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
626 KB
Volume
67-68
Category
Article
ISSN
0167-9317

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