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Fabrication of highlyc-axis textured ZnO thin films piezoelectric transducers by RF sputtering

โœ Scribed by Min-Chun Pan; Tzon-Han Wu; Tuan-Anh Bui; Wen-Ching Shih


Book ID
106398884
Publisher
Springer US
Year
2011
Tongue
English
Weight
563 KB
Volume
23
Category
Article
ISSN
0957-4522

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