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Fabrication of high-quality Josephson junctions for applications as particle detectors

โœ Scribed by R. Cristiano; L. Frunzio; S. Pagano; G. Spina

Book ID
105730509
Publisher
Italian Physical Society
Year
1997
Tongue
English
Weight
349 KB
Volume
19
Category
Article
ISSN
0392-6737

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The fabrication process of ramps for HTS ramp-edge Josephson junctions was studied. We refined a photolithography method for producing ramps having smooth surfaces without a tail structure and similar angles in a chip. Optimization of resist reflowing parameters was crucially important. It was found