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Fabrication of high aspect ratio nano gratings using SR lithography

✍ Scribed by Fumiki Kato; Shinya Fujinawa; Yigui Li; Susumu Sugiyama

Book ID: 106185119
Publisher: Springer-Verlag
Year: 2006
Tongue: English
Weight: 483 KB
Volume: 13
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-006-0215-y

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