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Fabrication of Diffraction Grating with High Aspect Ratio Using X-ray Lithography Technique for X-ray Phase Imaging

โœ Scribed by Noda, Daiji; Tanaka, Makoto; Shimada, Kazuma; Hattori, Tadashi


Book ID
111909541
Publisher
Institute of Pure and Applied Physics
Year
2007
Tongue
English
Weight
142 KB
Volume
46
Category
Article
ISSN
0021-4922

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