✦ LIBER ✦

Fabrication of HARM structures by deep-X-ray lithography using graphite mask technology

✍ Scribed by P. Coane; R. Giasolli; S. Ledger; K. Lian; Z. Ling; J. Göttert

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Fabrication of intermediate mask for dee

✍ T. Sheu; M. H. Chiang; S. Su 📂 Article 📅 1998 🏛 Springer-Verlag 🌐 English ⚖ 878 KB

A Si stencil mask for deep X-ray lithogr

✍ Harutaka Mekaru; Takayuki Takano; Yoshiaki Ukita; Yuichi Utsumi; Masaharu Takaha 📂 Article 📅 2008 🏛 Springer-Verlag 🌐 English ⚖ 747 KB

Fabrication of sub-micron structures for

✍ H. Ueno; Y. Zhang; N. Nishi; S. Sugiyama 📂 Article 📅 2000 🏛 Springer-Verlag 🌐 English ⚖ 156 KB

Fabrication of ceramic microcomponents u

✍ C. Müller; T. Hanemann; G. Wiche; C. Kumar; J. Goettert 📂 Article 📅 2005 🏛 Springer-Verlag 🌐 English ⚖ 493 KB

Mask design compensation for sloped side

✍ Mitsuhiro Horade; Sommawan Khumpuang; Kazuya Fujioka; Susumu Sugiyama 📂 Article 📅 2006 🏛 Springer-Verlag 🌐 English ⚖ 387 KB

Fabrication of RF MEMS variable capacito

✍ Sven Achenbach; David Klymyshyn; Darcy Haluzan; Timo Mappes; Garth Wells; Jürgen 📂 Article 📅 2006 🏛 Springer-Verlag 🌐 English ⚖ 368 KB