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Fabrication of grating patterns by e-beam lithography

✍ Scribed by H. Ohki; T. Asari; H. Takemura; M. Isobe; K. Moriya

Book ID: 103598022
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 423 KB
Volume: 9
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(89)90055-5

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