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Fabrication of grating gates for lateral surface superlattice devices using E-beam lithography

✍ Scribed by J. Caro; E.W.J.M. van der Drift; K.L. Hagemans; S. Radelaar


Book ID
107920313
Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
306 KB
Volume
5
Category
Article
ISSN
0167-9317

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