✦ LIBER ✦
Fabrication of high-efficiency multilayer-coated gratings for the EUV regime using e-beam patterned substrates
✍ Scribed by Patrick P Naulleau; J.Alexander Liddle; Erik H Anderson; Eric M Gullikson; Paul Mirkarimi; Farhad Salmassi; Eberhard Spiller
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 309 KB
- Volume
- 229
- Category
- Article
- ISSN
- 0030-4018
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