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Fabrication of 3-D Submicron Glass Structures by FIB

✍ Scribed by C.H. Chao; S.C. Shen; J.R. Wu

Book ID: 107458381
Publisher: Springer US
Year: 2009
Tongue: English
Weight: 592 KB
Volume: 18
Category: Article
ISSN: 1059-9495
DOI: 10.1007/s11665-008-9318-1

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