Imaging and analysis of 3-D structure using a dual beam FIB

✍ Scribed by D. McGrouther; P.R. Munroe

• Publisher: John Wiley and Sons
• Year: 2007
• Tongue: English
• Weight: 526 KB
• Volume: 70
• Category: Article
• ISSN: 1059-910X
• DOI: 10.1002/jemt.20406

✦ Synopsis

Abstract

The application of focused ion beam instrumentation in the generation of three‐dimensional microstructural data is described. The methodologies used to acquire and manipulate this data are explained, and the technique is illustrated by a number of examples from the material sciences. The limitations of this method, and practical pointers to the generation of meaningful data, are also discussed. Microsc. Res. Tech., 2007. © 2007 Wiley‐Liss, Inc.