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Fabrication and Testing of l = 2 Optical Vortex phase masks for Coronography

โœ Scribed by Mari, Elettra; Anzolin, Gabriele; Tamburini, Fabrizio; Prasciolu, Mauro; Umbriaco, Gabriele; Bianchini, Antonio; Barbieri, Cesare; Romanato, Filippo


Book ID
115412720
Publisher
Optical Society of America
Year
2010
Tongue
English
Weight
531 KB
Volume
18
Category
Article
ISSN
1094-4087

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Fabrication of phase masks, for fiber gr
โœ M. Ardito; L. Boschis; R. Palumbo; G. Meneghini ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 926 KB

This paper reports on the fabrication process of phase mask for fiber grating printing. The masks are produced by Electron Beam Lithography (EBL) and Reactive Ion Etching (RIE). A special writing strategy is used in order to reduce the stitching errors. RIE with CI-IF3 will be discussed. Finally mor