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Fabrication and Structural Evaluation of Beaded Inorganic Nanostructures Using Soft-Electron-Beam Lithography

✍ Scribed by S. Donthu; T. Sun; V. Dravid


Publisher
John Wiley and Sons
Year
2007
Tongue
English
Weight
314 KB
Volume
19
Category
Article
ISSN
0935-9648

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Epitaxially grown calcium strontium fluoride on gallium arsenide has been patterned by high energy electron beam lithography and wet development. Fabrication of lines and dots of \(8 \mathrm{~nm}\) size is reported. Electron diffraction experiments indicate that fluorine is removed under electron bo