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Fabrication and stability of binary clusters by reactive molecular ion irradiation

โœ Scribed by Hiroyuki Yamamoto; Takeru Saito


Book ID
114167045
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
112 KB
Volume
206
Category
Article
ISSN
0168-583X

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Self-encapsulated nickel microchannels and nickel nanowalls were fabricated with a new approach using reactive ion etching (RIE) process. The simple microfabrication process consists of nickel deposition, lithography, nickel RIE, and plasma ashing. Well-aligned nickel nanowalls and nickel self-encap