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Fabrication and some physical properties of AgIn5S8 thin films

โœ Scribed by A.F. Qasrawi; T.S. Kayed; I. Ercan


Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
112 KB
Volume
113
Category
Article
ISSN
0921-5107

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Physical properties of TiN thin films
โœ F. Marchetti; M. Dapor; S. Girardi; F. Giacomozzi; A. Cavalleri ๐Ÿ“‚ Article ๐Ÿ“… 1989 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 350 KB

This" paper reports on the characterization of films of titanium nitride (TIN) obtained by reactive sputtering of titanium in a nitrogen-rich ambient (r.f. sputtering) and by nitrogen implantation during vapour deposition of titanium thin films. In order to get a complete picture of the properties