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Fabrication and Replication of Polymer Integrated Optical Devices Using Electron-Beam Lithography and Soft Lithography †

✍ Scribed by Huang, Yanyi; Paloczi, George T.; Yariv, Amnon; Zhang, Cheng; Dalton, Larry R.

Book ID: 120611124
Publisher: American Chemical Society
Year: 2004
Tongue: English
Weight: 446 KB
Volume: 108
Category: Article
ISSN: 0022-3654
DOI: 10.1021/jp049724d

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