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Fabrication and optical transition dynamics of Er-doped ZnO thin films formed on Si substrates

✍ Scribed by X Zhao; S Komuro; H Isshiki; Y Aoyagi; T Sugano

Book ID
108344988
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
122 KB
Volume
87-89
Category
Article
ISSN
0022-2313

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## Abstract ZnO thin films doped with Li (ZnO:Li) were deposited onto SiO~2~/Si (100) substrates by direct‐current sputtering technique in the temperature range from room temperature to 500 Β°C. The crystalline structure, surface morphology and composition, and optical reflectivity of the deposited