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Fabrication and Optical Properties of Silicon Nanowires Arrays by Electroless Ag-catalyzed Etching

✍ Scribed by Jie Tang,Jianwei Shi,Lili Zhou,Zhongquan Ma


Book ID
126339781
Publisher
Nano-Micro Letters
Year
2011
Tongue
English
Weight
273 KB
Volume
3
Category
Article
ISSN
2311-6706

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## Abstract A systematic study of metal‐catalyzed etching of (100), (110), and (111) silicon substrates using gold catalysts with three varying geometrical characteristics: isolated nanoparticles, metal meshes with small hole spacings, and metal meshes with large hole spacings is carried out. It is