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Fabrication and electrical properties of Ba0.64Sr0.36TiO3thin films by sol-gel on platinum coated silicon

โœ Scribed by Tian-Jin Zhang; Hong Ni


Book ID
110392468
Publisher
Springer
Year
2002
Tongue
English
Weight
90 KB
Volume
37
Category
Article
ISSN
0022-2461

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Structure and dielectric properties of B
โœ Kyoung-Tae Kim; Chang-Il Kim ๐Ÿ“‚ Article ๐Ÿ“… 2003 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 382 KB

An alkoxide-based sol-gel method was used to fabricate Ba Sr TiO thin films doped by Bi from 5 to 20 0.6 0.4 3 mol% on a Pt / Ti / SiO / Si substrate. The structural and dielectric properties of BST thin films were investigated 2 as a function of Bi dopant concentration. The dielectric properties of